Harvard Catalyst Profiles

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Microtechnology

"Microtechnology" is a descriptor in the National Library of Medicine's controlled vocabulary thesaurus, MeSH (Medical Subject Headings). Descriptors are arranged in a hierarchical structure, which enables searching at various levels of specificity.

MeSH information
Definition  |  Details  |  More General Concepts  |  Related Concepts  |  More Specific Concepts
Manufacturing technology for making microscopic devices in the micrometer range (typically 1-100 micrometers), such as integrated circuits or MEMS. The process usually involves replication and parallel fabrication of hundreds or millions of identical structures using various thin film deposition techniques and carried out in environmentally-controlled clean rooms.


publications
Timeline   |   Most Recent
This graph shows the total number of publications written about "Microtechnology" by people in Harvard Catalyst Profiles by year, and whether "Microtechnology" was a major or minor topic of these publication.
Bar chart showing 55 publications over 16 distinct years, with a maximum of 8 publications in 2010
To see the data from this visualization as text, click here.
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